JPH0451139U - - Google Patents
Info
- Publication number
- JPH0451139U JPH0451139U JP9265490U JP9265490U JPH0451139U JP H0451139 U JPH0451139 U JP H0451139U JP 9265490 U JP9265490 U JP 9265490U JP 9265490 U JP9265490 U JP 9265490U JP H0451139 U JPH0451139 U JP H0451139U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- opening
- wafer carrier
- groove
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9265490U JPH0451139U (en]) | 1990-09-03 | 1990-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9265490U JPH0451139U (en]) | 1990-09-03 | 1990-09-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0451139U true JPH0451139U (en]) | 1992-04-30 |
Family
ID=31829292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9265490U Pending JPH0451139U (en]) | 1990-09-03 | 1990-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451139U (en]) |
-
1990
- 1990-09-03 JP JP9265490U patent/JPH0451139U/ja active Pending
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